Real Time Analyzer - 3D
Technic’s RTA (Real Time Analyzer) systems have set the standard for robust analytical performance in plating for over two decades. These highly reliable tools offer trouble-free, accurate analysis of your electroplating solutions by monitoring and controlling levels of chemical constituents.
The RTA 3D is ideally suited for semiconductor manufacturing applications that require high levels of precision, such as copper damascene and TSV (Through Silicon Vias).
Features
- Early fault detection capability
- Virtually consumable-free
- No need for reagents or chemical operations (no waste generated)
- Small footprint
- Very low maintenance
- Great reproducibility and accuracy
- High reliability
- Low cost of operation
Benefits
- Online in-tank method
- State-of-the-art electronic components
- Innovative electrochemical techniques
- Intuitive graphical user interface
- Full analysis of undiluted bath in 15-30 min. (all components)
- Automatic temperature correction capabilities
- Open software architecture allowing for customization and integration
- Design based on field experience and customer feedback

RTA 3D Fact Sheet
The RTA 3D is the culmination of years of lab and field experience. It combines successful technologies utilized by the previous well-established RTA systems with new features that further improve accuracy and reproducibility.