Standard Solution-Free RTA 3D

Standard-Solution-Free RTA Configuration

  • Readiness of a probe to take a reliable measurement can be automatically confirmed at any time.
  • RTA employs  a set of pre-calibrated probes.
  • RTA Electrodes do not deteriorate with time (no-drift, stable electrodes).
  • RTA uses state of the art self-diagnosis during every single measurement. 

Hardware -variety of electronic tests, pump test, probe test

Diagnostic Voltammograms - outlier detection for every single voltammogram

  • No need for in-house manual standard preparation eliminates possible exposure to chemicals
  • No-waste configuration eliminates need for disposing chemicals
  • No-need-for-standards configuration eliminates needs for consumable chemicals

The combination of no-waste and no-need-for-standards configuration provides the “GREENEST” metrology for copper damascene process available commercially.